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BROOKS

  • Steam transfer module vaporized products Brooks
Steam transfer module vaporized products Brooks

Steam transfer module vaporized products Brooks

  • Deposition of thin films to enhance thermal, optical, or hardness properties
  • Vaporization / humidification of water chemical vapor deposition of liquid hydrocarbons
  • The vaporized monomer is suitable for vacuum polymer film deposition to produce calibration steam
  • Product description: BROOKS product Brooks mass flow meter BROOKS rotor flow meter BROOKS float flow meter BROOKS mass flow controller / meter BROOKS pressure controller pressure transmitter BROOKSLC oval gear flow meter
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Vapor transport in plasma etching and photoresist stripping equipment
Application of ultra high purity deionized water in vaporization
Sub atmospheric pressure process chamber only
Product type: DI water vapor delivery module
Difference
High Purity DIW Vapor Delivery
Highest Flow Accuracy
Compact Design
EtherCAT Digital Communications
Enhance User Interface
Vapor draw
Fluid type DI water
Steam capacity
3000 sccm (DI Water)
Maximum pressure 200 Torr

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CONTACT US

Contact: peng gong

Phone: 18918462396

Tel: 021-59718851

Email: kunage@126.com

Add: Lane 819, Qinghewan Road, Qingpu Industrial Park, Qingpu District, Shanghai

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