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How to carry out different gas mass flow conversion?
The product is generally factory calibrated according to nitrogen and the flow rate is determined according to the nitrogen flow rate. Different gases are measured with the same size of MFM/MFC. When the flow detection value is the same, the actual flow value may be different. We give in the specification the mass flow conversion coefficients for different gases with respect to the calibration gas (nitrogen).
If the product you are using is a standard manufactured product (shown by nitrogen calibration) and you need to know the mass flow rate of the actually used gas, first find the conversion factor of the actually used gas in the product specification. In the measurement process, multiplying this coefficient by the flow rate display value is the mass flow rate of the actual use gas; conversely, when determining the range of the purchased product, the maximum expected flow rate value of the actual use gas is divided by the conversion factor, which is corresponding The nitrogen calibration product flow rate.
Air, O2, H2, CO, HCL, HF and other gases, its conversion coefficient is about 1.0, generally can be directly used to display the product by nitrogen calibration, without conversion.
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