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How is the mass flow controller used under high pressure conditions?

The working pressure difference range of the mass flow controller is usually relatively small. To operate normally under high pressure conditions, special attention must be paid to three points: First, select the MFC that meets the pressure resistance requirements; Second, select the working pressure range to be large The third part is to add a pressure reducing valve in front of the MFC gas path, stabilize the inlet pressure, add a back pressure valve downstream of the MFC, stabilize the pressure in the reaction chamber and the MFC outlet, and properly adjust the pressure reducing valve and back pressure valve. Ensure that the MFC's working pressure does not exceed the specified range. As long as the above three points are achieved, the MFC can work stably under high pressure conditions.

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