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What is the principle of the mass flow controller? - Focus on Microfluidic Control Technology

Mass flow controllers consist of flow sensors, shunt channels, flow control valves, and amplification controllers. The gas flow sensor uses the principle of capillary heat transfer and differential calorimetry to measure the mass flow of gas (no temperature pressure compensation is required). The flow signal measured by the sensor heating bridge is sent to the amplifier for amplification, and the amplified flow detection voltage is compared with the set voltage, and then the difference signal is amplified to control the regulating valve, and the closed loop control flows through the channel to make it The set flow rate is equal. The splitter determines the flow of the main channel. The flow indicator equipped with the mass flow controller is provided with a regulated power supply, a digital voltmeter, a set potentiometer, peripherals, internal conversion, and a three-position valve-controlled switch.

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