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What are the precautions for using the MFM/MFC?

(1) Pay attention to reading the product specification and related materials
(2) Pay attention to care and take care of it
MFM/MFC is more sophisticated and should avoid shocks and strong vibrations. When the product is not in use, it should be carefully stored in a good environment.
(3) Attention to system design
After purchasing MFM/MFC, users often need to set up a system. It is recommended that during system design, not only the implementation of the function, but also the reliability, safety, ease of operation, ease of maintenance, and ease of expansion of the system. Here are some specific suggestions:
A. Pay attention to the installation of filters to purify the air supply and extend the service life of the MFM/MFC.
B. For the reaction system, it is recommended to install a check valve on the outlet side of the MFC to prevent the reactants from flowing back and damaging the MFC under abnormal conditions.
C. For high-pressure systems, a back pressure valve (or other throttling device) and a pressure gauge should be installed downstream of the MFC to ensure the working pressure difference of the MFC.
D. For gases such as silane that easily form crystals in the presence of air, special attention should be paid to the tightness of the system (do not ignore the pressure reducer during leak detection). If necessary, design the purge bypass and perform nitrogen purge or positive pressure maintenance at any time.
E. For air systems that require a relatively high air volume, note that air fittings are minimized and VCR connectors are used. For systems that use harmful gases, strict leak detection must be performed. Gas cabinets should have an exhaust system to prevent damage to personnel and equipment.
F. Systems with high-frequency sources should pay attention to shielding and pay special attention to handle grounding problems, such as using single-point grounding.
The installation location of G.MFM/MFC should be easy to handle, detect, zero, and be safe and reliable.
H. For systems with high reliability requirements, attention should be paid to redundant designs.
(4) Pay attention to the correct operation
For more complex systems or systems that use hazardous gases, sophisticated safety procedures should be in place to prevent misuse.
(5) Note that the use of gas is compatible with the flowmeter seal material
The sealing material commonly used by our factory's flowmeters is fluoro rubber, which can be used for most gases, including strong corrosive gases such as HCL. However, for ammonia gas, ammonia-resistant rubber must be used; for organic solvent gases such as acetone and toluene, silicone rubber must be used; for strong corrosive media such as boron trichloride and boron tribromide, tetrafluoroethylene seals must be used. Or metal-sealed flow meter. The user must pay special attention to the order and use.
(6) Pay attention to periodic calibration
In principle, mass flow meters should be calibrated regularly.

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