Vacuum process requirements for the environment

Environmental requirements for conventional vacuum processes
        The so-called conventional vacuum process refers to the vacuum process without special requirements. The vacuum equipment (equipment) requirements for vacuum hygiene:

      (1) All parts of vacuum equipment in vacuum require no accumulation of pollution sources, no dust on the surface, no iron filings, no rust;

      (2) The surface of the vacuum chamber of the vacuum equipment should be smooth, free from loose structures and pores, and without internal welds, which affect the vacuum;

      (3) In high-vacuum equipment, the moving parts in the vacuum chamber shall not use oil as lubricant. The diffusion pump oil with low saturated vapor pressure and silicone oil shall be used as the lubricant; the sealing parts of the flange and observation window shall be coated with high vacuum grease;

      (4) Vacuum equipment should generally work in a clean air circulation environment with a temperature of 15 to 30 ° C and a relative humidity of not more than 70%. The inlet temperature of the cooling water is not higher than 25 °C.

Environmental requirements for electric vacuum processes
         In addition to good mechanical properties and processing properties, electric vacuum structural materials must meet other performance requirements, namely easy degassing, low saturated vapor pressure, certain chemical stability, certain purity and cleanliness, and suitable radiation. Ability, etc. Therefore, the electric vacuum process has special characteristics, and the requirements for cleaning treatment are extremely strict, and the contamination of parts should be removed or reduced to the utmost extent.

Environmental requirements for vacuum coating process

        The cleaning process of the surface of the vacuum coating process substrate (substrate) is very important. Before the substrate enters the coating chamber, it should be carefully cleaned before plating to achieve the purpose of degreasing, decontaminating and dewatering the workpiece. The surface contamination of the substrate comes from various dusts, polishing pastes, greases, perspirations, etc. adhered to the parts during processing, transmission and packaging; oxide films formed on the surface of the parts in humid air; gases absorbed and adsorbed on the surface of the parts. These contaminants can basically be removed by degreasing or chemical cleaning.