Introduction to the development trend of measurement technology and instruments

Measurement techniques and instruments involve the measurement of all physical quantities and are closely related to materials, engineering science, and energy science. The current development trend has the following points:

(1) Traces and transmits on a natural basis while achieving international comparisons at different ranges. If you don't have the ability to compare, you have to rely on other countries. 

 (2) High precision. At present, the typical line width of the semiconductor process is 0.25 μm and the transition is 0.18 μm. The predicted line width in 2009 is 0.07 μm. If the positioning requires 1/3 of the line width, accuracy of the order of 10 nm is required, and the wafer size is still increasing to 300 mm. This means that the accuracy of the measurement positioning system is better than 3 × 10 -8 power, and the corresponding laser frequency stabilization accuracy should be on the order of 10 to -9 power.

 (3) High speed. At present, the speed of processing machinery has increased to more than 1m/sec. The instruments developed before the 1980s have not adapted to the needs of the market. For example, HP's interferometer market is mostly occupied by Renishaw in the UK because the latter's speed has reached 1m/sec. 

 (4) High sensitivity, high resolution, and miniaturization. For example, the spectrometer is integrated on a circuit board. 

 (5) Standardization. The communication interface used to be GPIB and RS232. The high performance standards that may become alternatives are USB, IEEE1394 and VXI. Now, technology leaders are trying to control technical standards, and participation in standard setting is one of the basic research work for instrument development.

发展The development status of China's instrument technology 

 (1) Due to the long-term accustomed to copying foreign products, China's instrumentation industry lacks innovation ability and cannot keep up with the needs of scientific research and engineering construction. 

(2) A large number of scientific research achievements have been accumulated in the field of instrument science and technology research in China. Many of the achievements are at the international advanced level. It is necessary to improve and transform the snow shovel, but the degree of industrialization is very low, and there is no complete industry with international competitiveness. 

 future development trend

1. Development direction and the frontier of the discipline

(1) cooperate with technical innovation of numerical control equipment (such as spindle speed, precision creation)

The main sources of error in CNC equipment can be divided into geometric errors (a total of 21 items) and thermal errors. For recurring systematic errors, software corrections can be used; for large random errors, real-time correction methods should be used. For thermal errors, it is generally corrected by temperature measurement. One of the reasons why China's machine tool industry market shrinks and imports a large number of foreign equipment is because the technology in this area has not been promoted and applied. To this end, a high-speed multi-channel laser interferometer is required: its measurement speed is above 60m/min, and the sampling speed is more than 5000 times/sec to meet the needs of thermal error and geometric error measurement. The real-time measurement of the refractive index of the air should reach a level of 2 × 10 -7, and the measurement results and length measurement results can be input to the computer simultaneously.

(2) Monitoring and online inspection technology for operation and manufacturing processes

传感器 Sensors that combine the principles of image, spectrum, spectroscopy, fiber optics, and other interactions between light and matter have the advantages of non-contact, high sensitivity, high flexibility, and wide application range. The world of comprehensive innovation in this field is very broad, such as vibration, roughness, pollutants, water content, processing size and mutual position measurement. 

(3) Cooperate with the technological innovation of information industry and production science

In order to find a living space in an open environment, there is no way out without independent innovation. Therefore, some projects should be selected according to the principle of patent, technical content and market. According to the current development status, products needed in the fields of information, life medicine, environmental protection, agriculture, etc. should be given priority support. Such as precision instrumentation for interventional therapy in medicine, super-resolution lithography and cleaning methods in the electronics industry, and mechanism research. 

2. Priority area

In the early days of basic research, it is difficult to predict whether there will be breakthroughs. However, when breakthrough progress has been made, a conversion mechanism is needed to enter the market.