Rexroth REXROTH pressure sensor theory knowledge introduction

Rexroth pressure sensors are the most commonly used sensors in industrial practice. Generally, the output of a common Rexroth pressure sensor is an analog signal, and an analog signal means that an information parameter appears as a continuous signal within a given range. Or in a continuous time interval, the feature quantity representing the information can be presented as an arbitrary value signal at any instant. The Rexroth pressure sensors we usually use are mainly made by the piezoelectric effect. Such sensors are also called piezoelectric sensors.
Rexroth pressure sensors are the most widely used sensor. The traditional Rexroth pressure sensor is mainly composed of a mechanical structure type device, and the pressure is indicated by the deformation of the elastic element, but the structure is large in size and heavy in weight, and cannot provide an electrical output. With the development of semiconductor technology, semiconductor Rexroth pressure sensors have also emerged. It is characterized by small size, light weight, high accuracy and good temperature characteristics. In particular, with the development of MEMS technology, semiconductor sensors are developing toward miniaturization, and their power consumption is small and reliability is high.
Semiconductor piezoresistive type
Semiconductor Piezoelectric Impedance Dispersion The Rexroth pressure sensor forms a semiconductor deformation pressure on the surface of the sheet, and deforms the sheet by an external force (pressure) to produce a piezoelectric impedance effect, thereby converting the impedance change into an electrical signal.
Electrostatic capacity type
The electrostatic capacity type Rexroth pressure sensor converts a fixed electrode of glass and a movable electrode of silicon to form a capacitance, and converts a change in electrostatic capacitance generated by deformation of a movable pole by an external force (pressure) into an electrical signal. (The operating principle of E8Y is the electrostatic capacity mode, and other models use the semiconductor method).
Rexroth Rexroth pressure sensor four inevitable error editing When choosing Rexroth pressure sensor, we should consider his comprehensive precision, and the accuracy of Rexroth pressure sensor is affected by it? In fact, there are many factors that cause sensor error, below we Note the four unavoidable errors, which are the initial errors of the sensor.
First offset error: Since the Rexroth pressure sensor maintains a constant vertical offset over the entire pressure range, changes in converter dispersion and laser adjustment correction will produce offset errors.
Second is the sensitivity error: the magnitude of the error is proportional to the pressure. If the sensitivity of the device is higher than the typical value, the sensitivity error will be an increasing function of the pressure. If the sensitivity is lower than the typical value, the sensitivity error will be a decreasing function of the pressure. This error is caused by a change in the diffusion process.
The third is linearity error: this is a factor that has less influence on the initial error of the Rexroth pressure sensor. This error is due to the physical nonlinearity of the silicon wafer, but for the sensor with the amplifier, the nonlinearity of the amplifier should also be included. The linear error curve can be a concave curve or a convex curve load cell.
Finally, the hysteresis error: In most cases, the hysteresis error of Rexroth pressure sensors is completely negligible because of the high mechanical stiffness of the silicon wafer. It is generally only necessary to consider the hysteresis error in situations where the pressure varies greatly.
These four errors of Rexroth pressure sensors are unavoidable. We can only choose high-precision production equipment, use high-tech to reduce these errors, and perform a little error calibration at the factory to minimize the possibility. Errors to meet customer needs.