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How to reduce the air leakage rate of the vacuum system
The structure of the vacuum system is the key to affect the tightness of the vacuum system and the leak rate of the system. The structure of the vacuum system is reasonable or not, which will directly affect the sealing performance of the system and the leak rate of the system. In order to reduce the leakage rate of the system, we must improve the protective measures.
1, as far as possible to avoid the occurrence of a small radius of curvature of the dead angle, smooth transition to check the brakes in the polishing, cleaning and cleaning.
2. The pipeline connected to the vacuum chamber, such as the evacuation pipeline and the air supply pipeline, adopts a circular arc transition to make the gas passage unimpeded, but the convenience of cleaning and cleaning should be considered.
3. Carefully design the structure of various connecting parts in the vacuum chamber to make the air passage clear and avoid the air passage blockage.
4. Grind and polish the inner surface of the vacuum system. The brighter the surface, the less gas is absorbed, and the easier it is to obtain vacuum.
5. Minimize the volume of the vacuum chamber and shorten the piping system.
In the face of the choice of sealing form, we can choose the sealing form according to the level of vacuum required and the actual working needs.
When the sealing part is water-cooled, its temperature is around 80 °C, and the temperature of individual parts can reach above 100 °C). Therefore, choose the ideal sealing ring material. And used for vacuum sealing rubber materials, in addition to requiring a smooth surface, no scratches, no cracks, but also requires low permeability and gas output rate, good heat resistance and oil resistance, while having a certain strength, hardness and Elasticity, etc.